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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV : 4-6 February 2019, San Francisco, California, United States /

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Bibliographic Details
Corporate Authors: Laser Applications in Microelectronic and Optoelectronic Manufacturing LAMOM San Francisco, California, United States; SPIE Society; Okamoto Optics Works Japan; Plymouth Grating Laboratory United States
Group Author: Makimura, Tetsuya; Račiukaitis, Gediminas; Molpeceres, Carlos
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2019]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 10905
Subjects:
Microelectronics > Congresses
Photonics > Congresses
Item Description: "At SPIE LASE" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 27 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510624528
151062452X
CLC: TN405-532
O572.31-532
TN249-532
Call Number: TN249-532/L343.5/2019

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