Screen LibraryMicroelectromechanical systems--materials and devices IV:：symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
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| Corporate Authors: | ; |
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| Group Author: | |
| Published: |
Materials Research Society Cambridge University Press,
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| Publisher Address: | Warrendale, Pa. Cambridge [England] |
| Publication Dates: | c2011. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials Research Society symposium proceedings ; v. 1299 |
| Subjects: | |
| Carrier Form: | ix, 207 p.: ill. ; 24 cm. |
| ISBN: |
9781605112763 1605112763 |
| Index Number: | TM38 |
| CLC: | TM38-532 |
| Call Number: | TM38-532/S989/2010 |
| Contents: |
Papers presented at Symposium S, 'Microelectromechanical Systems--Materials and Devices IV,' held at the 2010 MRS Fall Meeting in Boston, Mass. Includes bibliographical references and indexes. |