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Microelectromechanical systems, materials and devices：symposium held November 26-28, 2007, Boston, Massachusetts, USA

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Bibliographic Details
Corporate Authors: Materials Research Society. Meeting (2007 Boston, Mass.); Symposium on Microelectromechanical Systems-- Materials and Devices (2007 Boston, Mass.)
Group Author: LaVan David A
Published: Materials Research Society,
Publisher Address: Warrendale, Pa.
Publication Dates: c2008.
Literature type: Book
Language: English
Series: Materials Research Society symposium proceedings ; v. 1052
Subjects:
Microelectromechanical systems > Materials
Microelectromechanical systems
Carrier Form: xi, 325 p.: ill. ; 24 cm.
ISBN: 9781558999909
1558999906
Index Number: TM38
CLC: TM38-532
TN205-532
Call Number: TM38-532/M626/2007
Contents: "This proceedings reports on research presented at Symposium DD, 'Microelectromechanical systems-- Materials and Devices' held November 26-28 at the 2007 MRS Fall Meeting in Boston, Massachusetts."--P. xi.
Previous conference proceedings entitled: Materials science of microelectromechanical systems (MEMS) devices symposium.
Includes bibliographical references and indexes.

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