Mechanics of microelectronics

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Bibliographic Details
Main Authors: Zhang G. Q
Group Author: Driel W. D. van; Fan X. J
Published: Springer,
Publisher Address: Dordrecht
Publication Dates: c2006.
Literature type: Book
Language: English
Series: Solid mechanics and its applications ; v. 141
Subjects:
Carrier Form: xiii, 563 p.: ill. ; 25 cm.
ISBN: 140204934X (hd. bd.)
9781402049347 (hd. bd.)
1402049358 (e-book)
9781402049354 (e-book)
Index Number: TH
CLC: TH-39
TN4
Call Number: TN4/Z634
Contents: State of the art report.
Includes bibliographical references.