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Gettering and defect engineering in semiconductor technology：GADEST 2003：Proceedings of the 10th International Autumn Meeting Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003

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Bibliographic Details
Corporate Authors: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (10th 2003 Seehotel Zeuthen, Germany)
Group Author: Richter H. 1940-; Kittler M.; (Martin)
Published: Sci-Tech Pub.,
Publisher Address: Uetikon-Zürich, Switzerland
Publication Dates: c2004.
Literature type: Book
Language: English
Series: Diffusion and defect data.. Pt. B,, Solid state phenomena,. Solid state phenomena, ; v. 95/96
Subjects:
Semiconductors
Getters
Silicon crystals > Defects
Electric engineering > Materials.
Carrier Form: xvi, 682 p.: ill. ; 25 cm.
ISBN: 3908450829
Index Number: TN3
CLC: TN3-532
Call Number: TN3-532/G394/2003
Contents: Includes bibliographical references and index.

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