Gettering and defect engineering in semiconductor technology XIV:selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fu rstenfeld), Austria

Saved in:
Bibliographic Details
Corporate Authors: International Meeting on Gettering and Defect Engineering in Semiconductor Technology 2011 Loipersdorf, Austria) (Loipersdorf, Austria))
Group Author: Schla ffer F.; (Friedrich); Jantsch W.; (Wolfgang) 1946-
Published: Trans Tech,
Publisher Address: Durnten-Zuerich
Publication Dates: c2011.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 178-179
Subjects:
Carrier Form: xii, 520 p.: ill. ; 25 cm.
ISBN: 9783037852323
3037852321
Index Number: TN3
CLC: TN3-532
Call Number: TN3-532/G394/2011
Contents: Includes bibliographical references and indexes.