Screen LibraryUltra clean processing of semiconductor surfaces VIII：UCPSS 2006 : selected, peer reviewed papers from the 8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Antwerp, Belgium, September 18-20, 2006
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| Group Author: | ; ; |
|---|---|
| Published: |
Trans Tech,
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| Publisher Address: | Stafa-Zuerich |
| Publication Dates: | c2008. |
| Literature type: | Book |
| Language: | English |
| Carrier Form: | xiv, 390 p.: ; 25 cm. |
| ISBN: |
3908451469 9783908451464 |
| Index Number: | TN305 |
| CLC: | TN305.2-532 |
| Call Number: | TN305.2-532/I617/2006 |
| Contents: | Includes index. |