Reset Filters
Branch: 浦东新区陆家嘴图书馆

Cover is for reference only

Ultra clean processing of silicon surfaces 2000：proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

Saved in:
Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Silicon Surfaces (5th 2000 Ostend, Belgium
Group Author: Heyns Marc M (Editor); Mertens Paul (Editor); Meuris Marc (Editor)
Published: Scitec Publications,
Publisher Address: Zeurich-Uetikon, Switzerland
Publication Dates: c2001.
Literature type: Book
Language: English
Series: Solid state phenomena ; v. 76-77.
Subjects:
Silicon > Surfaces
Contamination control
Carrier Form: xiii, 321 p.: ill. ; 26 cm.
ISBN: 3908450578
Index Number: TN305
CLC: TN305.2-532
Call Number: TN305.2-532/I617/2000
Contents: Includes bibliographical references and indexes.

Related Book Recommendations