Materials issues in silicon integrated circuit processing:symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
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Group Author: | ; ; |
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Published: |
Materials Research Society,
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Publisher Address: | Pittsburgh, Pa. |
Publication Dates: | c1986. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposia proceedings ; v. 71 |
Subjects: | |
Carrier Form: | xvii, 535 p.: ill. ; 24 cm. |
ISBN: | 0931837375 |
Index Number: | TN4 |
CLC: | TN4-532 |
Call Number: | TN4-53/M425.1/1986/ |
Contents: | Includes bibliographies and indexes. |