International Seminar on Film Preparation and Etching by Plasma Technology, at the University of Sussex, Brighton, England, 25-27, 1981.
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Corporate Authors: | |
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Published: |
Sira Institute,
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Publisher Address: | Chislehurst, Kent |
Publication Dates: | c1981. |
Literature type: | Book |
Language: | English |
Series: |
Thin solid films ; v. 86, no. 2/3 |
Subjects: | |
Carrier Form: | p. 99-277: ill. ; 24 cm. |
Index Number: | TN605 |
CLC: | TN605-532 |
Call Number: | TN605-53/S619/1981/ |
Contents: |
Cover title. Includes bibliographies. |