Screen LibraryInternational Seminar on Film Preparation and Etching by Plasma Technology, at the University of Sussex, Brighton, England, 25-27, 1981.
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| Corporate Authors: | |
|---|---|
| Published: |
Sira Institute,
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| Publisher Address: | Chislehurst, Kent |
| Publication Dates: | c1981. |
| Literature type: | Book |
| Language: | English |
| Series: |
Thin solid films ; v. 86, no. 2/3 |
| Subjects: | |
| Carrier Form: | p. 99-277: ill. ; 24 cm. |
| Index Number: | TN605 |
| CLC: | TN605-532 |
| Call Number: | TN605-53/S619/1981/ |
| Contents: |
Cover title. Includes bibliographies. |