The relationship between resistivity and dopant density for phosphorus- and boron-doped silicon /
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Main Authors: | |
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Group Author: | ; |
Published: |
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Literature type: | Book |
Language: | English |
Series: |
Semiconductor measurement technology |
Carrier Form: | v, 47 p. ill. ; 27 cm. |
CLC: | TM934.16 |
Call Number: | TM934.16/T536 |