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Micromachining and microfabrication process technology：23-24 October, 1995, Austin, Texas

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Bibliographic Details
Corporate Authors: National Institute of Standards and Technology U.S; Society of Photo-Optical Instrumentation Engineers; Semiconductor Equipment and Materials International
Group Author: Markus Karen W
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c1995.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 2639
Subjects:
Microfabrication > Congresses
Electromechanical devices > Design and construction > Congresses
Micromachining > Congresses
Carrier Form: vii, 336 p.: ill. ; 28 cm.
ISBN: 0819420050
Index Number: TH11
CLC: TH11-532
TB4-532
Call Number: TH11-532/M626.2/1995
Contents: Includes bibliographical references and index.

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