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Beam processing technologies /

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Bibliographic Details
Corporate Authors: Elsevier Science & Technology.
Group Author: Einspruch, Norman G. (Editor); Cohen, Simon S. (Simon S.) (Editor); Singh, Raj N. (Editor)
Published: Academic Press,
Publisher Address: San Diego, Calif. :
Publication Dates: 1989.
Literature type: eBook
Language: English
Series: VLSI electronics ; v. 21.
Subjects:
Integrated circuits > Very large scale integration.
Electron beams.
Ion bombardment.
Molecular beam epitaxy.
TECHNOLOGY & ENGINEERING > Mechanical.
Electronic books.
Online Access: http://www.sciencedirect.com/science/bookseries/07367031/21
Carrier Form: 1 online resource (xii, 546 pages) : illustrations.
Bibliography: Includes bibliographical references and index.
ISBN: 9781483217857
148321785X
Index Number: TK7874
CLC: TN47

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