Beam processing technologies /
Saved in:
Corporate Authors: | |
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Group Author: | ; ; |
Published: |
Academic Press,
|
Publisher Address: | San Diego, Calif. : |
Publication Dates: | 1989. |
Literature type: | eBook |
Language: | English |
Series: |
VLSI electronics ; v. 21. |
Subjects: | |
Online Access: |
http://www.sciencedirect.com/science/bookseries/07367031/21 |
Carrier Form: | 1 online resource (xii, 546 pages) : illustrations. |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9781483217857 148321785X |
Index Number: | TK7874 |
CLC: | TN47 |