Screen LibraryGettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK /
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| Group Author: | |
|---|---|
| Published: |
Trans Tech publications Ltd,
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| Publisher Address: | Durnten-Zurich : |
| Publication Dates: | [2014] |
| Literature type: | Book |
| Language: | English |
| Series: |
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206 |
| Subjects: | |
| Carrier Form: | xiv, 516 pages : illustrations (black and white) ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9783037858240 3037858249 |
| Index Number: | TK7871 |
| CLC: | TN3-532 |
| Call Number: | TN3-532/G394/2013 |