Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK /
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Group Author: | |
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Published: |
Trans Tech publications Ltd,
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Publisher Address: | Durnten-Zurich : |
Publication Dates: | [2014] |
Literature type: | Book |
Language: | English |
Series: |
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206 |
Subjects: | |
Carrier Form: | xiv, 516 pages : illustrations (black and white) ; 24 cm. |
Bibliography: | Includes bibliographical references and index. |
ISBN: |
9783037858240 3037858249 |
Index Number: | TK7871 |
CLC: | TN3-532 |
Call Number: | TN3-532/G394/2013 |