Gettering and defect engineering in semiconductor technology XVI : selected, peer reviewed papers form the GADEST 2015 : Geetering and Defect Engineering in Semiconductor Technology, September 20-25, 2015, Bad Staffelstein, Germany /
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Corporate Authors: | |
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Group Author: | |
Published: |
Trans Tech Publications,
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Publisher Address: | Pfaffikon : |
Publication Dates: | [2016] |
Literature type: | Book |
Language: | English |
Series: |
Solid state phenomena,
volume 242 |
Subjects: | |
Carrier Form: | xii, 498 pages : illustrations, forms ; 24 cm. |
Bibliography: | Includes bibliographical references and indexes. |
ISBN: |
9783038356080 (paperback) : 3038356085 (paperback) |
CLC: | TN3-532 |
Call Number: | TN3-532/G394/2015 |