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离子注入原理与技术

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Bibliographic Details
Corporate Authors: 北京市辐射中心; 北京师范大学低能核物理研究所离子注入研究室
Published: 北京出版社
Publisher Address: 北京
Publication Dates: 1982
Literature type: Book
Language: Chinese
Subjects:
离子注入—半导体工艺
半导体工艺—离子注入
Carrier Form: 365页: ; 26cm
Index Number: TN305
CLC: TN305.3
Call Number: TN305.3/1042

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