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Cover is for reference only
离子注入原理与技术
Saved in:
Bibliographic Details
Corporate Authors:
北京市辐射中心
;
北京师范大学低能核物理研究所离子注入研究室
Published:
北京出版社
Publisher Address:
北京
Publication Dates:
1982
Literature type:
Book
Language:
Chinese
Subjects:
离子注入—半导体工艺
半导体工艺—离子注入
Carrier Form:
365页: ; 26cm
Index Number:
TN305
CLC:
TN305.3
Call Number:
TN305.3/1042
Subscription Summary
上海图书馆提供最近两年现报现刊的开架阅览服务,装订后的过报过刊合订本进入淮海路馆基藏书库后提供闭架调阅服务。由于从下架到入库会有较⻓的周期,读者可以通过专业服务⻔户(
https://z.library.sh.cn
)利用电子期刊查找所需文献。
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