Technical digest of the 16th International Vacuum Microelectronics Conference:July 7-11, 2003, Senri Life Science Center, Toyonaka, Osaka, Japan

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Bibliographic Details
Corporate Authors: International Vacuum Microelectronics Conference (16th 2003 Osaka, Japan; Institution of Electrical Engineers; IEEE Electron Devices Society; American Vacuum Society
Group Author: Takai Mikio; Gotoh Yasuhito; Ishikawa Junzo
Published: IEEE Electron Devices Society AVS Science & Technology,
Publisher Address: [Piscataway, N.J.] [s.l.]
Publication Dates: c2003.
Literature type: Book
Language: English
Subjects:
Carrier Form: xx, 314 p.: ill. ; 30 cm.
ISBN: 4818195154 (pbk.)
Index Number: TN4
CLC: TN4-532
Call Number: TN4-532/I61.8/2003
Contents: "IEEE Catalogue Number 03TH8703"--T.p. verso.
Includes bibliographical references and author index.