Gettering and defect engineering in semiconductor technology XIV:selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fu rstenfeld), Austria
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Corporate Authors: | |
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Group Author: | ; ; ; |
Published: |
Trans Tech,
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Publisher Address: | Durnten-Zuerich |
Publication Dates: | c2011. |
Literature type: | Book |
Language: | English |
Series: |
Solid state phenomena ; v. 178-179 |
Subjects: | |
Carrier Form: | xii, 520 p.: ill. ; 25 cm. |
ISBN: |
9783037852323 3037852321 |
Index Number: | TN3 |
CLC: | TN3-532 |
Call Number: | TN3-532/G394/2011 |
Contents: | Includes bibliographical references and indexes. |