Screen LibraryProceedings of: Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment：2008 Spring Topical Meeting, April 7 and 8,2008 ; Lawrence Berkeley National Laboratory, Berkeley, California
Saved in:
| Corporate Authors: | ; |
|---|---|
| Published: |
ASPE,
|
| Publisher Address: | Raleigh, NC |
| Publication Dates: | 2008. |
| Literature type: | Book |
| Language: | English |
| Carrier Form: | viii, 142 p.: ill. ; 28 cm. |
| ISBN: | 9781887706469 |
| Index Number: | TH7 |
| CLC: | TH7-532 |
| Call Number: | TH7-532/P963/2008 |
| Contents: | Includes bibliographical references and index. |