Proceedings of: Precision Mechanical Design and Mechatronics for Sub-50nm Semiconductor Equipment：2008 Spring Topical Meeting, April 7 and 8,2008 ; Lawrence Berkeley National Laboratory, Berkeley, California

Corporate Authors: ASPE Spring Topical Meeting on Precision Mechanical Design & Mechatronics for Sub-50nm Semiconductor Equipment (2008 Berkeley, Californica); The American Society for Precision Engineering
Published: ASPE,
Publication Dates: 2008.
Call Number: TH7-532/P963/2008