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Etching of III-V semiconductors：an electrochemical approach

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Bibliographic Details
Main Authors: Notten P.H.L. (Peter H. L.)
Group Author: Meerakker J.E.A.M. van der; J.J. Kelly J.J.; (John J.)
Published: Elsevier Advanced Technology,
Publisher Address: Oxford
Publication Dates: c1991.
Literature type: Book
Language: English
Subjects:
Semiconductors > Etching.
Electrochemistry.
Carrier Form: xiv, 349 p.: ill. ; 24 cm.
ISBN: 0946395845
Index Number: TN305
CLC: TN305.2

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