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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Bibliographic Details
Corporate Authors: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1988 Chicago, Ill; Electrochemical Society. High Temperature Materials Division; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Bibyk Steven B
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1989.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 89-7
Subjects:
Silicon nitride > Congresses
Silicon dioxide > Congresses
Thin film devices > Congresses
Electric insulators and insulation > Thin films > Congresses
Carrier Form: vii, 455 p.: ill. ; 23 cm.
Index Number: TM215
CLC: TM215.3-532
Contents: Includes bibliographical references.

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