Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
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Corporate Authors: | ; ; ; |
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Group Author: | |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1989. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / Electrochemical Society ; v. 89-7 |
Subjects: | |
Carrier Form: | vii, 455 p.: ill. ; 23 cm. |
Index Number: | TM215 |
CLC: | TM215.3-532 |
Contents: | Includes bibliographical references. |