Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Corporate Authors: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1988 Chicago, Ill; Electrochemical Society. High Temperature Materials Division; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Bibyk Steven B
Published: Electrochemical Society,
Publication Dates: c1989.