Micromachining technology for micro-optics：20 September 2000, Santa Clara, USA

Corporate Authors: Semiconductor Equipment and Materials International.; Solid State Technology (Organization); Sandia National Laboratories.; Society of Photo-Optical Instrumentation Engineers
Group Author: (Sing H.), 1939-; Johnson Eric Gunner, 1936-; Lee S. H.
Published: SPIE,
Publication Dates: c2000.
Call Number: TN25-532/M626-4/2000