Gettering and defect engineering in semiconductor technology：GADEST 2003：Proceedings of the 10th International Autumn Meeting Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003

Corporate Authors: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (10th 2003 Seehotel Zeuthen, Germany)
Group Author: Richter H. 1940-; Kittler M.; (Martin)
Published: Sci-Tech Pub.,
Publication Dates: c2004.
Call Number: TN3-532/G394/2003