Advanced microlithography technologies：8-10 November, 2004, Beijing, China

Corporate Authors: Zhongguo guang xue xue hui; Australian Optical Society; Guo jia zi ran ke xue ji jin wei yuan hui China; Society of Photo-Optical Instrumentation Engineers
Group Author: Yao Jun'en; Progler Christopher J; Wang Yangyuan
Published: SPIE,
Publication Dates: c2005.
Call Number: TN405.7-532/A244/2004