Proceedings of the symposia on Electrochemical Processing in ULSI Fabrication I：and Interconnect and Contact Metallization, Materials, Processes, and Reliability

Corporate Authors: Symposium on Electrochemical Processing in ULSI Fabrication (1st 1998 San Diego, Calif; Electrochemical Society. Electrodeposition Division; Electrochemical Society. Meeting 1998 San Diego, Calif.); Electrochemical Society. Dielectric Science and Technology Division; Symposium on Interconnect and Contact Metallization: Materials, Processes, and Reliability (1998 Boston, Mass.); Electrochemical Society. Electronics Division
Group Author: Andricacos Panayotis C 1951-
Published: Electrochemical Society,
Publication Dates: c1999.
Call Number: TN470.5-532/S989/1998