Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors VI：13-14 August 2012, San Diego, California, United States

Corporate Authors: National Institute of Standards and Technology U.S; SPIE Society
Group Author: Postek Michael T; Coleman Victoria Anne 1981-; Orji Ndubuisi G
Published: SPIE,
Publication Dates: c2012.
Call Number: TB383-532/I599/2012