MEMS '99 : Twelfth IEEE International Conference on Micro Electro Mechanical Systems：technical digest : Orlando, Florida, USA, January 17-21, 1999

Corporate Authors: IEEE International Conference on Micro Electro Mechanical Systems (12th 1999 Orlando, Florida; IEEE Robotics and Automation Society
Published: IEEE,
Publication Dates: c1999.
Call Number: TM38-532/I61/1999/