2004 proceedings：Ninth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC), February 24-26, 2004, Marriott Hotel, Marina Del Rey, CA : a specialty conference of 2004 Microelectronics Institute Inter on-chip Connection.

Corporate Authors: International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference (9th 2004 Marina Del Rey, Calif; Microelectronics Institute Inter on-chip Connection
Published: IMIC Headquarters?,
Publication Dates: 2004]
Call Number: TN47-532/I612/2004