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Handbook of 3D Integration : 3D process technology /

Group Author: Garrou, Philip E; Koyanagi, Mitsumasa; Ramm, Peter
Published: Wiley-VCH,
Publication Dates: 2014.

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2

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Handbook of 3D integration. Volume 3, 3D process technology /

Group Author: Garrou, Philip E; Koyanagi, Mitsumasa; Ramm, Peter
Published: Wiley-VCH,
Publication Dates: [2014]
Call Number: TN47-62/H236/v.3

Book

3

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2000 5th International Symposium on Plasma Process-Induced Damage：May 22-24, 2000, Santa Clara, California, USA

Corporate Authors: International Symposium on Plasma Process-Induced Damage (5th 2000 Santa Clara, California; American Vacuum Society; IEEE Electron Devices Society; Ōyō Butsuri Gakkai
Group Author: Koyanagi Mitsumasa; Engelhardt Manfred; Gabriel Calvin T
Published: Northern California Chapter of the American Vacuum Society,
Publication Dates: c2000.
Call Number: TN405.98-532/I61/2000

Book

4

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1999 4th International Symposium on Plasma Process-Induced Damage：May 9-11, 1999, Monterey, California, USA

Corporate Authors: International Symposium on Plasma Process-Induced Damage (4th 1999 Monterey, Calif; IEEE Electron Devices Society; American Vacuum Society; Ōyō Butsuri Gakkai
Group Author: Dao Leanne Thuy Lien 1958-; Koyanagi Mitsumasa; Hook Terence
Published: Northern California Chapter of the American Vacuum Society,
Publication Dates: c1999.
Call Number: TN405.98-532/I61/1999/

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