Author Results for Monahan Kevin M

Monahan,Kevin M
Society of Photo-Optical Instrumentation Engineers
Kevin M. Monahan, chair-editor ; sponsored by SPIE-the International Society for Optical Engineering
Society of Photo-optical Instrumention Engineers
Wong,Alfred Kwok-Kit

1
Handbook of critical dimension metrology and process control

Cover is for reference only
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Monahan Kevin M
Published: SPIE Optical Engineering Press,
Publication Dates: c1994.
Call Number: TN40-62/H236/1993/
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2
Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California

Cover is for reference only
Group Author: Monahan Kevin M
Published: SPIE,
Publication Dates: 1989.
Call Number: TN4-53/I61.7/1989/
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4
Integrated circuit metrology, inspection, and process control [papers]

Cover is for reference only
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Monahan Kevin M
Published: SPIE--the International Society for Optical Engineering,
Publication Dates: c1987.
Call Number: TN4-53/I61.7/1987/
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