Rapid isothermal processing：12-13 October 1989, Santa Clara, California

Corporate Authors: North Carolina State University. Center for Advanced Electronic Materials Processing; University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing; SEMATECH Organization; Society of Photo-Optical Instrumentation Engineers
Group Author: Singh Rajendra 1946-
Published: SPIE,
Publication Dates: c1990.
Call Number: TN305-53/R218/1989/