馆藏书目查询系统 - 上海图书馆

1

Cover is for reference only

Diagnostic techniques for semiconductor materials processing II：symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.

Group Author: Pang Stella W
Published: Materials Research Society,
Publication Dates: c1996.
Call Number: TN304.07-532/D536/1995/

Book

2

Cover is for reference only

Photons and low energy particles in surface processing：symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A.

Group Author: Brannon James H.; Pang Stella W.; Ashby Carol Iris Hill, 1953-
Published: Materials Research Society,
Publication Dates: c1992.

Book

3

Cover is for reference only

Micromachining and microfabrication process technology III：29-30 September, 1997, Austin, Texas

Corporate Authors: Semiconductor Equipment and Materials International; National Institute of Standards and Technology U.S; Solid State Technology; Society of Photo-Optical Instrumentation Engineers
Group Author: Chang Shih-Chia; Pang Stella W
Published: SPIE,
Publication Dates: c1997.
Call Number: TH11-532/M626.2/1997/

Book

4

Cover is for reference only

Micromachining and microfabrication process technology II：14-15 October 1996, Austin, Texas

Corporate Authors: Semiconductor Equipment and Materials International; National Institute of Standards and Technology U.S; Society of Photo-Optical Instrumentation Engineers
Group Author: Chang Shih-Chia; Pang Stella W
Published: SPIE--The International Society of Optical Engineering,
Publication Dates: c1996.
Call Number: TH11-532/M626.2/1996/

Book

Narrow Search