Plasma processing：proceedings of the fourth Symposium on Plasma Processing

Corporate Authors: Symposium on Plasma Processing (4th 1983 San Francisco, CA; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectrics and Insulation Division
Group Author: Schwartz G. C; Smolinsky G; Mathad G. S
Published: Electrochemical Society,
Publication Dates: c1983.
Call Number: TN403-53/I61/1983/