Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Corporate Authors: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (2nd 1986 San Diego, Calif; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Kapoor Vikram J; Hankins Kevin T
Published: Electrochemical Society),
Publication Dates: c1987.
Call Number: TM215.3-53/S989.1/1986/