Science and technology of microfabrication：symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

Corporate Authors: Symposium on the Science and Technology of Microfabrication (1986 Boston, Mass.) (Boston, Mass.)); Materials Research Society. Meeting (1986 Boston, Mass.) (Boston, Mass.))
Group Author: Howard R. E.; (Richard Edwin), 1948-
Published: Materials Research Society,
Publication Dates: c1987.
Call Number: TN47-53/S416/1986/