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Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology

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Bibliographic Details
Corporate Authors: International Symposium on Process Physics and Modeling in Semiconductor Technology (4th 1996 Los Angeles, Calif.)
Group Author: Murthy C. S.; Dunham S. T.; (Scott T.); Srinivasan G. R.
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1996.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 96-4
Subjects:
Crystals > Defects > Mathematical models
Ion implantation > Mathematical models
Semiconductors > Mathematical models.
Carrier Form: x, 528 p.: ill. ; 23 cm.
ISBN: 1566771544
Index Number: TN305
CLC: TN305-532
Call Number: TN305-532/I61.1/1996/
Contents: This Fourth International Symposium was held in Los Angeles, California, May 5-10, 1996, as part of The Spring Meeting of the Electrochemical society.
Includes bibliographical references and indexes.

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