Proceedings of the Fourth International Symposium of Process Physics and Modeling in Semiconductor Technology
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Corporate Authors: | |
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Group Author: | ; ; ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1996. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / Electrochemical Society ; v. 96-4 |
Subjects: | |
Carrier Form: | x, 528 p.: ill. ; 23 cm. |
ISBN: | 1566771544 |
Index Number: | TN305 |
CLC: | TN305-532 |
Call Number: | TN305-532/I61.1/1996/ |
Contents: |
This Fourth International Symposium was held in Los Angeles, California, May 5-10, 1996, as part of The Spring Meeting of the Electrochemical society. Includes bibliographical references and indexes. |