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Microlithographic techniques in IC fabrication：25-26 June, 1997, Singapore

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers. Singapore Chapter; Institute of Physics, Singapore; Society of Photo-optical Instrumentation Engineers. Japan Chapter; Nanyang Technological University; Society of Photo-Optical Instrumentation Engineers
Group Author: Yu Raymond; Mack Chris A; Yoon Soon-Fatt
Published: SPIE,
Publisher Address: Bellingham, Washington
Publication Dates: c1997.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 3183
Subjects:
Integrated circuits > Very large scale integration > Congresses
Microlithography > Congresses
Carrier Form: vii, 264 p.: ill. ; 28 cm.
ISBN: 0819426105
Index Number: TN405
CLC: TN405.7-532
Call Number: TN405.7-532/M626/1997/
Contents: Includes bibliographic references and author index.

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