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Ultra clean processing of silicon surfaces VII：UCPSS 2004 : proceedings of the 7th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS) held in Brussels, Belgium, September 20-22, 2004

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Clean Processing of Silicon Surfaces (7th 2004 Brussels, Belgium
Group Author: Meuris Marc; Mertens Paul; Heyns Marc
Published: Trans Tech Publications,
Publisher Address: Uetikon-Zuerich, Switzerland
Publication Dates: c2005.
Literature type: Book
Language: English
Series: Solid state phenomena
Subjects:
Silicon > Surfaces
Contamination control
Semiconductor wafers > Cleaning
Carrier Form: xiv, 396 p.: ill. ; 25 cm.
ISBN: 390845106X (pbk.)
9783908451068 (pbk.)
Index Number: TN305
CLC: TN305.2-532
Call Number: TN305.2-532/I617/2004
Contents: Includes bibliographical references and index.

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