Handbook of sputter deposition technology:fundamentals and applications for functional thin films, nano-materials and MEMS
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Group Author: | ; ; |
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Published: |
William Andrew,
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Publisher Address: | Waltham, MA |
Publication Dates: | 2012. |
Literature type: | Book |
Language: | English |
Edition: | 2nd ed. |
Subjects: | |
Carrier Form: | xii, 644 p.: ill. ; 24 cm. |
ISBN: |
9781437734836 1437734839 |
Index Number: | TN305 |
CLC: | TN305.92-62 |
Call Number: | TN305.92-62/W312/2nd.ed. |
Contents: | Includes bibliographical references and index. |