Screen LibraryHandbook of sputter deposition technology：fundamentals and applications for functional thin films, nano-materials and MEMS
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| Group Author: | ; ; |
|---|---|
| Published: |
William Andrew,
|
| Publisher Address: | Waltham, MA |
| Publication Dates: | 2012. |
| Literature type: | Book |
| Language: | English |
| Edition: | 2nd ed. |
| Subjects: | |
| Carrier Form: | xii, 644 p.: ill. ; 24 cm. |
| ISBN: |
9781437734836 1437734839 |
| Index Number: | TN305 |
| CLC: | TN305.92-62 |
| Call Number: | TN305.92-62/W312/2nd.ed. |
| Contents: | Includes bibliographical references and index. |