Screen LibraryAdvances in mirror technology for X-ray, EUV lithography, laser and other applications：7-8 August 2003, San Diego, California, USA
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| Corporate Authors: | |
|---|---|
| Group Author: | ; ; |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c2004. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 5193 |
| Subjects: | |
| Carrier Form: | ix, 222 p.: ill. (some col.) ; 28 cm. |
| ISBN: | 0819450669 |
| Index Number: | TH74 |
| CLC: | TH74-532 |
| Call Number: | TH74-532/A244/2003 |
| Contents: | Includes bibliographical references and index. |