Screen LibraryHandbook of semiconductor wafer cleaning technology：science, technology, and applications
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| Group Author: | |
|---|---|
| Published: |
Noyes Publications,
|
| Publisher Address: | Park Ridge, N.J. |
| Publication Dates: | c1993. |
| Literature type: | Book |
| Language: | English |
| Series: |
Materials science and process technology series.Electronic materials and process technology |
| Subjects: | |
| Carrier Form: | xx, 623 p.: ill. ; 25 cm. |
| ISBN: | 0815513313 |
| Index Number: | TN43 |
| CLC: | TN43-62 |
| Call Number: | TN43-62/H236/ |
| Contents: | Includes bibliographical references and index. |