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Semiconductor cleaning technology, 1989：proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Bibliographic Details
Corporate Authors: International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (1st 1989 Hollywood, Fla; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Novak Richard E; Ruzyllo Jerzy
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1990.
Literature type: Book
Language: English
Series: Electrochemical Society. Proceedings ; v. 90-9
Subjects:
Semiconductor wafers > Cleaning > Congresses
Carrier Form: x, 399 p.: ill. ; 23 cm.
Index Number: TN305
CLC: TN305-532
Call Number: TN305-53/I61.3/1989/
Contents: "Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii.
Includes bibliographical references and indexes.

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