Screen LibraryProceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
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| Corporate Authors: | ; ; |
|---|---|
| Group Author: | ; |
| Published: |
Electrochemical Society,
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| Publisher Address: | Pennington, NJ |
| Publication Dates: | c1992. |
| Literature type: | Book |
| Language: | English |
| Series: |
Electrochemical Society proceedings ; v. 92-12 |
| Subjects: | |
| Carrier Form: | xi, 502 p.: ill. ; 23 cm. |
| ISBN: | 1566770122 |
| Index Number: | TN305 |
| CLC: | TN305.99-532 |
| Call Number: | TN305.99-532/I61/1992/ |
| Contents: |
Based on the papers presented at the symposium held at the Electrochemical Society Fall meeting in Phoenix, Arizona, Oct. 14-18, 1992. Includes bibliographical references and indexes. |