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Surface scattering and diffraction for advanced metrology II：9 July, 2002, Seattle, Washington, USA

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Bibliographic Details
Corporate Authors: Boeing Company; Society of Photo-Optical Instrumentation Engineers
Group Author: Maradudin Alexei A.; Gu Zu-Han.
Published: SPIE,
Publisher Address: Bellingham, Washington
Publication Dates: c2002.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4780
Subjects:
Optical measurements
Scattering (Physics)
Carrier Form: vii, 186 p.: ill. ; 28 cm.
ISBN: 0819445479
Index Number: TH74
CLC: TH74-532
O436-532
O441.5-532
Call Number: TH74-532/S961/2002
Contents: Includes bibliographic references and author index.

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