Materials, technology and reliability for advanced interconnects and low-k dielectrics--2004:symposium held April 13-15, 2004, San Francisco, California, U.S.A
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Corporate Authors: | ; |
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Group Author: | ; |
Published: |
Materials Research Society,
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Publisher Address: | Warrendale, Pa. |
Publication Dates: | c2004. |
Literature type: | Book |
Language: | English |
Series: |
Materials Research Society symposium proceedings, ; v. 812 |
Subjects: | |
Carrier Form: | xiii, 402 p.: ill. ; 24 cm. |
ISBN: | 1558997628 |
Index Number: | TM21 |
CLC: |
TM21-532 TN4-532 TN304-532 |
Call Number: | TN304-532/M425/2004 |
Contents: |
"This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii. Includes bibliographical references and indexes. |